Fabrication of Ideally Ordered Anodic Porous Alumina on Glass Substrates by Stamping Process Using Flexible Stamps

Establishing a process to fabricate anodic porous alumina with an ordered array of uniform-sized pores on substrate is important challenge fabricating various functional devices. In this study, was fabricated glass substrates by stamping using flexible stamp. This enables the formation resist mask at low pressure sample surface pattern starting point for pore generation during anodization. Therefore, it possible samples without breaking substrate, and subsequent anodization can generate substrate. The stamps be applied regardless roughness Al film because stamp deforms according shape, even when there protruding structure surface. addition, shown that could used form surfaces three-dimensional curvatures, such as convex lenses.